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A diffusion pump is a type of vacuum pump used to create extremely high vacuums. It works by diffusing gas into a jet of mercury or heavy oil vapor. This vapor then carries the gas away, and the vapor is separated from the gas through condensation.1

Diffusion pumps are essential in vacuum technology, which involves processes and measurements conducted under below-normal atmospheric pressure. These vacuums are created for several reasons, including preventing unwanted chemical reactions, removing dissolved gases, extending particle travel distances, and reducing molecular collisions for cleaner surfaces. Diffusion pumps are particularly useful for applications requiring ultra-high vacuums, such as in the study of clean surfaces and radio-frequency sputtering.2

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