reactive ion etching References reactive ion etching finishing process Ask Anything Homework Help Also known as: RIE Written by The Information Architects of Encyclopaedia Britannica The Information Architects maintain a master list of the topics included in the corpus of Encyclopædia Britannica, and create and manage the relationships between them. The Information Architects of Encyclopaedia Britannica Britannica AI Ask Anything Learn about this topic in these articles: integrated circuit/ Etching…with strong chemicals or by reactive ion etching (RIE). RIE is like sputtering in the argon chamber, but the polarity is reversed and different gas mixtures are used. The atoms on the surface of the wafer fly away, leaving it bare. Read More…with strong chemicals or by reactive ion etching (RIE). RIE is like sputtering in the argon chamber, but the polarity is reversed and different gas mixtures are used. The atoms on the surface of the wafer fly away, leaving it bare. Read More
