etching

A layer can be removed, in entirety or in part, either by etching away the material with strong chemicals or by reactive ion etching (RIE). RIE is like sputtering in the argon chamber, but the polarity is reversed and different gas mixtures are used.…

…can be revealed through chemical etching (erosion) of the material surface using an acid or base solution. If charged particles have irradiated the surface at some time in the past, then each leaves a trail of damaged material that begins at the surface and extends to a depth equal to…