sputter-initiated RIS

Sputter-initiated Resonance Ionization Spectroscopy (SIRIS) is a highly sensitive analytical method used in physics and chemistry. It utilizes lasers to eject electrons from atoms or molecules, creating ions and free electrons that are then detected. This process allows for the identification and quantification of elements and compounds, even at the single-atom level.123

SIRIS specifically leverages the neutral atoms ejected during sputtering, a process where energetic particles strike a solid surface. Unlike secondary ions, the neutral atoms are less affected by the sample's composition. This method is particularly useful for analyzing high-purity materials in the electronics industry and for depth-profiling samples. It can also be applied in fields like medicine, biology, and environmental research.123