solid phase epitaxy

crystallography

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July 16, 2026

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Solid phase epitaxy is a method for growing crystalline thin films. In this process, an amorphous (noncrystalline) film is first deposited onto a crystalline substrate. The substrate and film are then heated, causing the amorphous film to convert into a crystalline layer. This conversion is an epitaxial growth process, meaning the orientation of the new crystal layer is determined by the underlying substrate crystal. This technique allows for the creation of crystalline layers in a solid state, distinguishing it from vapor phase or liquid phase epitaxy. This method is valuable for fabricating various materials, particularly in the field of semiconductors.12

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epitaxy
In solid phase epitaxy a thin amorphous (noncrystalline) film layer is first deposited on a crystalline substrate, which is then heated to convert the film into a crystalline layer. The epitaxial growth then proceeds by a layer-by-layer process in the solid phase through atomic motion during…
Read More
In solid phase epitaxy a thin amorphous (noncrystalline) film layer is first deposited on a crystalline substrate, which is then heated to convert the film into a crystalline layer. The epitaxial growth then proceeds by a layer-by-layer process in the solid phase through atomic motion during…
Read More