secondary ion mass spectrometry References Images secondary ion mass spectrometry physics Ask Anything Homework Help Also known as: SIMS Written by The Information Architects of Encyclopaedia Britannica The Information Architects maintain a master list of the topics included in the corpus of Encyclopædia Britannica, and create and manage the relationships between them. The Information Architects of Encyclopaedia Britannica Britannica AI Ask Anything Learn about this topic in these articles: surface analysis/ Secondary ion mass spectroscopy and ion scattering spectroscopy For both SIMS and ISS, a primary ion beam with kinetic energy of 0.3–10 keV, usually composed of ions of an inert gas, is directed onto a surface. When an ion strikes the surface, two events can… Read More For both SIMS and ISS, a primary ion beam with kinetic energy of 0.3–10 keV, usually composed of ions of an inert gas, is directed onto a surface. When an ion strikes the surface, two events can… Read Morespectroscopy/ Sputter atomizationIn the secondary ion mass spectrometry (SIMS) method, these secondary ions are used to gain information about the target material (see mass spectrometry: Secondary-ion emission). In contrast, the sputter-initiated RIS (SIRIS) method takes advantage of the much more numerous neutral atoms emitted in the sputtering process. In… Read MoreIn the secondary ion mass spectrometry (SIMS) method, these secondary ions are used to gain information about the target material (see mass spectrometry: Secondary-ion emission). In contrast, the sputter-initiated RIS (SIRIS) method takes advantage of the much more numerous neutral atoms emitted in the sputtering process. In… Read More