ion scattering spectroscopy

Ion scattering spectroscopy (ISS) is a surface analysis technique that measures the change in kinetic energy of a low-energy primary ion scattered from a sample's surface. This method is highly surface-sensitive, primarily analyzing the top atomic layer.1

How ISS Works:

• A beam of ions interacts with the material's surface.1
• When an ion scatters elastically from a surface atom, its kinetic energy changes.1
• The ratio of the ion's energy before and after scattering provides information about the mass of the surface atom.1

ISS is valuable for elemental analysis and can be used for surface mapping and depth profiling, though it is typically qualitative or semiquantitative. It is sensitive to elements heavier than helium.1