Auger electron spectroscopy

physics

Also known as: AES

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June 18, 2026

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Auger electron spectroscopy (AES) is a surface analysis technique used to determine the elemental composition of a material. It works by bombarding the material's surface with a beam of electrons. This interaction can cause an electron to be ejected from an inner shell of an atom, creating a vacancy.12

An electron from a higher energy shell then drops to fill this vacancy, releasing energy. This energy can be emitted as an X-ray or, through the Auger effect, it can eject another electron, known as an Auger electron. The kinetic energy of these Auger electrons is characteristic of the specific chemical elements present, allowing for elemental identification. AES is particularly useful for surface mapping and depth profiling due to its focused electron beam and rapid analysis capabilities. However, it is limited to analyzing conductors and semiconductors because charge buildup can occur on insulators.21

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surface analysis
Auger electron spectroscopy
Energies of Auger electrons (named after French physicist Pierre Auger), like energies of XPS photoelectrons, are characteristic of the individual chemical elements. Thus, it is possible to use AES to analyze surfaces in much the same way as XPS is used. However,…
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Energies of Auger electrons (named after French physicist Pierre Auger), like energies of XPS photoelectrons, are characteristic of the individual chemical elements. Thus, it is possible to use AES to analyze surfaces in much the same way as XPS is used. However,…
Read More

chemical analysis
Electron spectroscopy
…are monitored, the method is Auger electron spectroscopy (AES). Other forms of less frequently used electron spectroscopy are available as well.
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…are monitored, the method is Auger electron spectroscopy (AES). Other forms of less frequently used electron spectroscopy are available as well.
Read More

spectroscopy
Relation to atomic structure
Auger spectroscopy, the analysis of the energy of the emitted electrons when a surface is bombarded by electrons at a few kilovolt energies, is commonly used in surface science to identify the elemental composition of the surface.
Read More
Auger spectroscopy, the analysis of the energy of the emitted electrons when a surface is bombarded by electrons at a few kilovolt energies, is commonly used in surface science to identify the elemental composition of the surface.
Read More