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How are inert gases removed by a sputter ion pump?
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vacuum technology
Diagram of a McLeod gauge.
In vacuum technology, a sputter ion pump removes inert gases through the processes of ionization and burial in the cathode.1
Specifically, the pump operates by using a high-voltage anode to create ions that bombard the cathode material, such as titanium. While active gases are removed through chemical combination with the sputtered titanium, inert gases are ionized and subsequently driven into the cathode material, where they are trapped or "buried". This mechanism allows the pump to maintain ultrahigh vacuum conditions without the need for organic contaminants or vibration.1
Would you like to know more about how other types of pumps, such as cryopumps, handle gases that are difficult to remove?